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Prof. Dr. Rainer Kegel is a distinguished physicist with extensive experience in metrology and semiconductor research. His work has significantly contributed to advancements in precise measurements at the nanoscale, particularly within the context of semiconductor materials and devices. He has held prominent positions at leading German research institutions, including the Physikalisch-Technische Bundesanstalt (PTB) and Technische Universität Berlin (TU Berlin). His expertise encompasses areas such as X-ray reflectometry, nanometrology, and characterization of thin films and nanostructures, playing a vital role in establishing standards and methodologies for advanced material science. Professor Kegel is also dedicated to educating the next generation of physicists and engineers.
Rainer Kegel's work history includes a series of influential roles in various companies. Here is a detailed list of his professional journey:
Led research groups and projects at PTB focusing on the development of advanced metrological techniques for semiconductor industry and nanotechnology, ensuring high-precision characterization of nanoscale materials and structures.
Authored and co-authored numerous influential publications on X-ray reflectometry (XRR) and grazing incidence X-ray fluorescence (GIXRF) for the analysis of thin films, significantly advancing the understanding and application of these techniques.
Served as a professor at TU Berlin, contributing to the curriculum in physics and materials science, and mentoring numerous PhD students and postdoctoral researchers who have gone on to impactful careers.
Contributed to the establishment of national and international standards in metrology, particularly for dimensional measurements at the nanoscale, supporting quality assurance in high-tech industries.
Wirtschaftsuniversität Wien
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